Rasterelektronmikroskoop (PC-SEM)

Jeol JSM-6490 Bruker XFlash Detektor

Type: Jeol JSM-6490
Jeol JSM-6490 Scanning Electron Microscope (PC-SEM)
Modern, high-resolution, digital scanning electron microscope featuring newly developed electron optics and an intuitive, graphical user interface (GUI) running on Microsoft Windows XP Professional.

Instrument configuration includes the following features:
• Magnification range: 5x – 300,000x
• Acceleration voltage: 0.3 – 30 kV
• Tungsten filament cathode (LaB6 cathode optional)
• Large fully motorized sample stage with eccentric tilt capability, including:
– Graphic navigation on the sample holder
– Easy sample navigation via click-center-zoom
– Field-of-view controlled navigation via two navigators
– Relative coordinate navigation
– Save and recall of sample positions
– Adjustable stage field-of-view selection
• Field-of-view correction during rotation via computer-driven eccentric rotation
• Field-of-view correction during tilting via computer-driven eccentric tilting
• Calculation of the possible tilt angle based on sample geometry
• Automatic focus tracking when moving the sample in the Z-axis
• Intelligent limit switches for all motorized axes
Itedpfx Aiezd Ufaj Teh
• Stage travel:
X = 125 mm
Y = 100 mm
Z = 5 to 80 mm (stepless)
T = -10°C to +90°C
R = 360° (continuous)
• Secondary electron detector for high vacuum operation
• Newly designed, super-conical objective lens for optimal resolution at high tilt angles
• Guaranteed SE image resolution: 3 nm at 30 kV and 15 nm at 1 kV
• Simultaneous live imaging with multiple detectors
• Powerful image measurement functions
• Movie function for recording dynamic processes
• Versatile specimen chamber with numerous expansion options: free ports for EDX, WDX, EBSD, cathodoluminescence, etc.
• Low-maintenance, quiet pump system consisting of a fore vacuum pump, vibration-free high-performance diffusion pump, and electromagnetic valve control
• Comprehensive safety procedures against misuse and external media failure
• Ergonomic, height-adjustable system table
• SEM starter kit including 2 sample holders, tool kit, and 6 replacement filaments

Additional equipment for SEM:
• Turbomolecular pump (instead of standard diffusion pump)
– Use of a turbomolecular pump eliminates the need for cooling water during SEM operation.

Further SEM equipment:
• PC for SEM control including TFT monitor
• ΟΧ200 Bruker Quantax 200 Extended EDX System
– Bruker EDX software will be transferred to new owner upon purchase
• Nitrogen-free, energy-dispersive X-ray analysis system including:
– SDD detector with 127 eV energy resolution or better
– Detection for all elements from boron upwards
– Vibration-free, maintenance-free. Peltier cooled (no nitrogen required)
– Pulse processor
– TFT monitor
– Spectrum measurement and element identification
– Fully automatic, quantitative, standardless elemental analysis
– Image acquisition
– Ultra-fast qualitative line scan
– Ultra-fast qualitative element mapping
– Data management and archiving system
– Report generation and results output
– Data communication
– Installation and user training
– HyperMap
– Multipoint analysis
– Bruker xFlash detector (SDD) with signal processing unit SVE III

Scope of delivery: (see photos)
Condition: used
(Subject to changes and errors in the technical data and specifications!)

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