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FRT MicroProf MPR 1250

Fries Research & Technology
Device Designation: FRT MicroProf® MPR 1250
The FRT MicroProf® MPR 1250 is a high-precision surface metrology system from the MicroProf® series by Fries Research & Technology GmbH (FRT). These systems are designed for non-destructive and contactless analysis of surface parameters such as topography, roughness, layer thickness, and more.

Features of the FRT MicroProf:

Device Details:
Model: FRT MicroProf® MPR 1250
Item Number: 200 00
Sensor Type: CWL 300 µm
Serial Number: 0904001
Measurement Principle: Chromatic confocal point sensor
Light Source: Halogen lamp, white light
Vertical resolution: up to 3 nm
Measurement accuracy (Z): 100 nm
Lateral resolution (XY): 2.5 µm
Measurement angle to surface: 90° ±30°
Max. sample size: approx. 310 x 310 x 50 mm

Technical Data (Excerpt):

XY-Stage:
Type: Compact XY-cross table
Travel (measurement range): 200 x 200 mm
Guidance: mechanical cross roller guide
Drive: DC motor with ball screw
Position feedback system: Heidenhain glass scale with reference mark
System resolution: 0.2 µm
Repeatability: < ±1 µm
Orthogonality XY: < 4 µm / 200 mm
Vertical runout (per axis): < 2 µm / 200 mm

Z-Axis (motorized):
Type: Linear axis
Travel: 50 mm (optional 100 mm)
Drive: Stepper motor with spindle drive
Lateral runout: < 2 µm / 50 mm

Manual Coarse Adjustment (optional):
Type: Dovetail guide
Adjustment range: up to 300 mm sample height

Measurement:
Minimum point spacing (XY): 0.6 µm
Sample size: approx. 310 x 310 x 50 mm
Max. sample weight: 5 kg (optional 10 kg)
Measuring speed: 1 µm/s up to max. 100 mm/s

System:
Total weight: approx. 275 kg (measurement setup: 225 kg)
Footprint (measurement setup): approx. 0.9 x 0.8 m
Dimensions control unit (W x D x H): approx. 0.55 x 0.53 x 0.32 m
Power supply (EU/US): 110–240 V, 50–60 Hz, 16 A
Power consumption: approx. 300–400 W

Operating Conditions:
Temperature range: 22 °C ±5 °C
Temperature stability: < 0.5 °C
Weight approx. 500 kg

Condition:
The device is in very good technical and cosmetic condition.
All axes move precisely and smoothly.

Scope of Delivery:
MicroProf® MPR200 00 XY measuring system
Control unit
Connection cables
(Subject to technical modifications and errors. All information without obligation!)
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Inspection and onsite testing available by appointment.
For further questions, feel free to contact us by phone.

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