PVD katmisseade

ARC-Tron 800V16

Number of heating elements: 4
Power (per heater): approx. 10 kW (230 V/400 V)
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Max. temperature: 700 °C
Max. process temperature: 600 °C
Thermocouple: Type K
Temperature control: PLC software-based regulation
Thyristor controller: AEG Thyro 1A-230-60H

Cooling (chamber):
Consumption 2: (4.0...8.5) m³/h
Inlet temperature: (15...18) °C
Outlet temperature: (20...28) °C
Pressure: (3.5...4.5) bar
Water quality: mechanically clean, visually clear
pH value (at 20 °C): (6.5...8)
Max. particle size: < 25 μm
Water hardness: < 15 °dH
Chloride ions: < 80 mg/l
Total chloride and sulfate content: < 160 mg/l

Cooling (evaporator):
Consumption 3: (1.5...2.5) m³/h
Inlet temperature: (6...10) °C
Outlet temperature: (12...15) °C
Pressure: (3.5...4.5) bar
Water quality: mechanically clean, visually clear
pH value (at 20 °C): (6.5...8)
Max. particle size: < 25 μm
Water hardness: < 15 °dH
Chloride ions: < 80 mg/l
Total chloride and sulfate content: < 160 mg/l

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